发明名称 |
METHOD FOR THE APPLICATION OF A CONFORMAL NANOCOATING BY MEANS OF A LOW PRESSURE PLASMA PROCESS |
摘要 |
<p>The invention relates to a conformal nanocoating applied by a low pressure plasma process. The invention also relates to a method for making such a conformal nanocoating on a three-dimensional nanostructure, in particular a three- dimensional structure containing electrically conductive and non-conductive elements.</p> |
申请公布号 |
SG182542(A1) |
申请公布日期 |
2012.08.30 |
申请号 |
SG20120052296 |
申请日期 |
2011.01.21 |
申请人 |
EUROPLASMA NV |
发明人 |
LEGEIN, FILIP;VANLANDEGHEM, ANTHONY;MARTENS, PETER |
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