| 摘要 |
<P>PROBLEM TO BE SOLVED: To shorten purification time to efficiently supply necessary chemical solution. <P>SOLUTION: A chemical supply unit 10 has a first chemical valve 20 made of resin, having a first input port 28 and supplying first chemical solution, a second chemical valve 30 made of resin, having a second input port 38 and supplying second chemical solution, and a flow path block 11 provided with an output port 15, and in the chemical supply unit 10: (a) the first chemical valve 20 and the second chemical valve 30 are opposed to the flow path block 11 and are firmly fixed, (b) on two surfaces opposed perpendicularly to a surface provided with the output port 15, of the flow path block 11, the first input port 28 and the second input port 38 are provided, (c) a center line of the first input port 28 is positioned outside from an outer circumferential surface 231 of a valve body 23 of the first chemical valve 20, and (d) a center line of the second input port 38 is positioned outside from an outer circumferential surface of the valve body 33 of the second chemical valve 30. <P>COPYRIGHT: (C)2012,JPO&INPIT |
