| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for diagnosing deterioration of a lubricant coating liquid, the method which is applicable even when a concentration of a lubricant in a coating liquid is low, which is simple and which can be carried out with a minute amount of a sample, considering the importance of process management of a lubricant coating liquid in order to stably form a uniform lubricant layer of a predetermined film thickness in an application process of a lubricant. <P>SOLUTION: The method for diagnosing deterioration of a lubricant coating liquid comprises: volatilizing and removing a solvent by drying a coating liquid, then measuring various ions generated by TOF-SIMS (time-of-flight secondary ion mass spectroscopy); comparing an ionic strength of C<SB POS="POST">3</SB>H<SB POS="POST">5</SB>O as a reference with an ionic strength of C<SB POS="POST">6</SB>H<SB POS="POST">11</SB>O<SB POS="POST">3</SB>of a Bis-form lubricant terminal structure as a marker; and determining a service life of the lubricant coating liquid based on the ionic strength ratio (C<SB POS="POST">6</SB>H<SB POS="POST">11</SB>O<SB POS="POST">3</SB>ionic strength/C<SB POS="POST">3</SB>H<SB POS="POST">5</SB>O ionic strength) to diagnose deterioration. <P>COPYRIGHT: (C)2012,JPO&INPIT |
