发明名称 RESIST COMPOSITION, RESIST FILM THEREFROM AND METHOD OF FORMING NEGATIVE PATTERN USING THE COMPOSITION
摘要 Provided is a resist composition including a resin (A) containing any of repeating units (a) of general formulae (I-a) and (I-b) below and any of repeating units (b) of general formula (II) below but containing substantially no repeating unit in which an alcoholic hydroxyl group is introduced, and any of compounds (B) of general formulae (III-a) and (III-b) below.
申请公布号 US2012219891(A1) 申请公布日期 2012.08.30
申请号 US201213406165 申请日期 2012.02.27
申请人 FUJIFILM CORPORATION 发明人 FUJII KANA;TAKAHASHI HIDENORI;NISHIYAMA FUMIYUKI
分类号 G03F7/20;B32B3/10;G03F7/004 主分类号 G03F7/20
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