| 摘要 |
<P>PROBLEM TO BE SOLVED: To calculate an accurate diameter value even for a measurement object having a diameter value different from a diameter value of a measurement object to be a reference by calculating a center shift amount which is a shift amount of a generatrix of the measurement object and a detection point and executing correction. <P>SOLUTION: A circularity measuring apparatus matches the center of the measurement object with the center of rotation, rotates the measurement object relative to a detector and measures circularity of the measurement object. The circularity measuring apparatus includes: means for moving a reference measurement object in a direction orthogonal to a detection direction of the detector for the reference measurement object; means for calculating the center shift amount which is the shift amount of the generatrix of the reference measurement object and a detection point for the reference measurement object of the detector on the basis of a change amount of detection values at respective positions when moving the reference measurement object from a reference position in the direction orthogonal to the detection direction of the detector; and means for correcting a measured value of the optional measurement object on the basis of the calculated center shift amount. <P>COPYRIGHT: (C)2012,JPO&INPIT |
