发明名称 |
ABRASIVE RECOVERY METHOD AND ABRASIVE RECOVERY DEVICE |
摘要 |
Provided are an abrasive recovery method and abrasive recovery device capable of recovering a slurry comprising a highly-concentrated abrasive while avoiding increases in pressure loss and large decreases in the recovery rate due to membrane blocking. A device (1) for recovering an abrasive from a used polishing slurry which has been used in a CMP process has a separation membrane (41) with a cylindrical hole passage into which the used polishing slurry is introduced. The hole passage of the separation membrane (41) is no more than 0.8m in length in an effective filtration unit. The abrasive recovery device (1) concentrates the abrasive of the used polishing slurry to a concentration of 10 mass% or greater. |
申请公布号 |
WO2012114395(A1) |
申请公布日期 |
2012.08.30 |
申请号 |
WO2011JP04593 |
申请日期 |
2011.08.16 |
申请人 |
NOMURA MICRO SCIENCE CO., LTD.;ISHII, KEIICHIRO;HIOKI, SHOJI |
发明人 |
ISHII, KEIICHIRO;HIOKI, SHOJI |
分类号 |
H01L21/304;B01D61/14;B01D61/58;B01D63/02;B01D63/06;B01D71/16;B01D71/26;B01D71/34;B01D71/36;B01D71/64;B01D71/68;B24B37/00;B24B57/00;C02F1/44 |
主分类号 |
H01L21/304 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|