GLOBAL METAL FILM THICKNESS MEASURING DEVICE

摘要

A global metal film thickness measuring device comprises: a base (10); a rotation table (20), comprising a stator part (21) and a rotor part (22), the stator part (21) being fixed on the base (10), the rotor part (22) being fixedly provided with a working table (50), the working table (50) being internally provided with a vacuum pipeline, and a rotation joint (23) of the rotor part (22) being connected with the vacuum pipeline; and a straight line unit (30), comprising a guide rail (31) and a slide block (32) capable of sliding along the guide rail (31), the guide rail (31) being fixed on the base (10), the slide block (32) being fixedly connected with a horizontal suspended arm (40), the other end of the suspended arm (40) being provided with a measuring head (80) opposite a table surface of the working table (50), and the measuring head (80) being internally provided with an eddy current probe (82).