| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system for determining a thickness of a layer in a multilayer structure. <P>SOLUTION: A system includes a first electrode 122 configured to be disposed in contact with a first face of a multilayer structure, a second electrode 124 configured to be disposed in contact with a second face of the multilayer structure, the second face being positioned at an opposite side of the first face, a pressure control device 144 configured to substantially press the first electrode to the multilayer structure with predetermined sampling pressure, the sampling pressure being pressure for the electric impedance of a sample to track reference impedance related to the sample, and a measuring device 160 electrically coupled to the first electrode 122 and the second electrode 124, the measuring device being configured to measure the electric impedance between the first electrode and the second electrode. <P>COPYRIGHT: (C)2012,JPO&INPIT |
