SUBSTRATE PROCESSING DEVICE AND INFORMATION MANAGEMENT METHOD

摘要

PROBLEM TO BE SOLVED: To easily distinguish in which state device information is created.

SOLUTION: When a state selection operation part 9 is operated by an operator, a state of a substrate processing device 1 is selected from a plurality of states including an operating state and a maintenance state. A state information output part 10 outputs the state of the substrate processing device 1 selected by the operator as state information. A device information output part 13 outputs an event which has occurred in the substrate processing device 1 as device information. A history information output part 11 outputs history information including the device information and the state of the substrate processing device 1 selected when the device information is output. A storage part 14 stores the plurality of pieces of history information. The plurality of pieces of history information stored in the storage part 14 are displayed on a display part 17.

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