发明名称 |
METHODS AND APPARATUS FOR THE MEASUREMENT OF FILM THICKNESS |
摘要 |
Methods and apparatus for measuring thickness of a thin film include: obtaining a high-speed thickness measurement of a thin film using a laser projection system and detector array, obtaining thickness measurements of the thin film at one or more locations using a single-point measurement apparatus and determining the accuracy of the high-speed measurement values by comparing them to one or more of the absolute thickness values of the film as measured by the single-point measurement apparatus.
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申请公布号 |
WO2012115643(A1) |
申请公布日期 |
2012.08.30 |
申请号 |
WO2011US25979 |
申请日期 |
2011.02.24 |
申请人 |
CORNING INCORPORATED;MOLL, JOHANNES |
发明人 |
MOLL, JOHANNES |
分类号 |
G01B11/06;G01B11/245;G01B21/04 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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