| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a piezoelectric vibration piece, a piezoelectric vibration piece, a piezoelectric transducer, an oscillator, an electronic apparatus, and a wave clock, capable of uniformly forming a coating pattern on a piezoelectric plate while suppressing the increase in manufacturing ma-hours, degradation of manufacturing efficiency and fluctuations in vibration characteristics. <P>SOLUTION: A photoresist film formation process is implemented with a formation device 71 that includes a sprayer 73 for spraying a photoresist material by generating an air flow toward a metal film 43 on a wafer S and a plurality of spacers 74 arranged between a work stage 72 and the wafer S. <P>COPYRIGHT: (C)2012,JPO&INPIT |
