| 摘要 |
<P>PROBLEM TO BE SOLVED: To facilitate pressure measurement of individual devices. <P>SOLUTION: A sealed device includes a space 15 formed in a sealed state on a substrate 11 and is provided with: a device part 12 in the sealed space; a pressure measurement means 13 for measuring the pressure in the sealed space; output wires 17 which energize the pressure measurement means and connect with the outside of the sealed space; and output pads 18 connected to the output wires. <P>COPYRIGHT: (C)2012,JPO&INPIT |
