摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for electromagnetically casting a silicon ingot, which can reduce generation of flameout of plasma arc in casting. <P>SOLUTION: In a method for electromagnetically casting a silicon ingot, in which a silicon raw material 12 is charged in a conductive bottomless cooling crucible 7, and heated by electromagnetic induction from an induction coil 8 surrounding the bottomless cooling crucible 7; while an inert gas is jetted out from a plasma torch 14, a plasma arc is generated to plasma-heat the silicon raw material to thereby melt the silicon raw material; and the molten silicon 13 is solidified while being pulled down from the bottomless cooling crucible 7 to thereby cast a silicon ingot 3, the gap Z between the plasma torch 14 and the molten silicon 13 is made 1/2 of a height Zt from which the silicon raw material is charged. <P>COPYRIGHT: (C)2012,JPO&INPIT |