| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately measure the inclination of a cylindrical component even if the cylindrical component is minute. <P>SOLUTION: An inclination measuring method of a cylindrical component 100 having a circular insertion hole 101 and a stepped portion 102 includes emitting diffusion light from an illumination unit to an imaging unit, matching a focal position of the imaging unit with an end portion 101a of the circular insertion hole at a side of the imaging unit, capturing a first image of the cylindrical component after adjusting relative positions of the cylindrical component and the illumination unit in such a manner that the contrast in the end portion inside/outside the circular insertion hole becomes equal to or more than a predetermined value, matching the focal position with an end portion 102a of the stepped portion at a side of the imaging unit, capturing a second image of the cylindrical component after adjusting relative positions in such a manner that the contrast in the end portion inside/outside an internal space of the stepped portion becomes equal to or more than a predetermined value, calculating first central coordinates of the circular insertion hole in the first image and second central coordinates of the internal space of the stepped portion in the second image, and detecting the inclination of the cylindrical component on the basis of the first central coordinates and the second central coordinates. <P>COPYRIGHT: (C)2012,JPO&INPIT |
