| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the accuracy of displaying a waveform without increasing the time taken before the waveform is generated. <P>SOLUTION: A semiconductor testing apparatus 1, which is provided with a determination part 12 determining whether voltage that is output from a DUT2 is within a measurement range MR, comprises: a determination control part 23 for performing control for the determination part 12 so as to shift, for each unit voltage VU, the measurement range MR which is 1.5 times the size of the unit voltage VU that is obtained when division by a set number of voltage divisions VD is performed between a voltage minimum value Vmin and a voltage maximum value Vmax; and a waveform generation part 25 for generating a voltage waveform on the basis of the determination result of the determination part 12. <P>COPYRIGHT: (C)2012,JPO&INPIT |
