| 摘要 |
A method for fabricating a buried bit line in a semiconductor device includes forming a liner oxide layer over the entire surface of a substrate having bodies isolated by a trench, selectively etching the liner oxide layer contacted with one side surface of the trench to a given depth, forming a sacrifice layer at a larger height than an etched surface of the liner oxide layer wherein the sacrifice layer partially fills the trench to the larger height, forming a liner nitride layer on sidewalls of the trench over the sacrifice layer, removing the sacrifice layer to expose a part of a body at the one side surface of the trench, forming a barrier layer along the entire surface of the resultant structure including the liner oxide layer, and forming a buried bit line over the barrier layer to be contacted with the exposed part of the body.
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