发明名称 EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER
摘要 A movable electrode assembly for use in a laser system, includes a first electrode having a first discharge surface, a second electrode having a second discharge surface. The second electrode being arranged opposite from the first electrode. The second discharge surface being spaced apart from the first discharge surface by a discharge gap. A discharge gap adjuster interfaced with at least one of the second electrode or the first electrode, the discharge gap adjuster configured to adjust the discharge gap. A method of adjusting a discharge gap is also disclosed.
申请公布号 US2012219032(A1) 申请公布日期 2012.08.30
申请号 US201213469009 申请日期 2012.05.10
申请人 SANDSTROM RICHARD L.;CHUNG TAE (MARK) H.;UJAZDOWSKI RICHARD C. 发明人 SANDSTROM RICHARD L.;CHUNG TAE (MARK) H.;UJAZDOWSKI RICHARD C.
分类号 H01S3/097 主分类号 H01S3/097
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