| 摘要 |
A spectrometer module (1) is provided with a package body (2), a package lid (7) and a support substrate (11), a transmission grating element (13), a mirror element (20), and a photodetection element (15). A cavity (3) is formed in the body (2). The lid (7) and the substrate (11) are attached to the body (2) in such a manner as to face the bottom surface (3b) of the cavity (3), and allow light (L) to penetrate inside the cavity (3) from outside the cavity (3). The grating element (13) is supported by the substrate (11), and diffracts light (L) emitted from outside the cavity (3), and allows the light (L) to penetrate to the bottom surface (3b) side of the cavity (3). The mirror element (20) is positioned on the bottom surface (3b) of the cavity (3), and reflects the light (L) diffracted by the grating element (13). The photodetection element (15) is supported by the substrate (11), and detects the light (L) reflected by the mirror element (20). |
