发明名称 SIMULATION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a simulation method capable of calculating a shape near an interface more accurately when a large time step is taken, or when the step for calculating a surface growth rate is reduced. <P>SOLUTION: In the simulation method of simulating a machining shape of a material surface, the step when the material surface traverses a material interface is calculated by determining a time interval &Delta;t of the step by using a distance from the material surface to the material interface, and a surface growth rate. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012165024(A) 申请公布日期 2012.08.30
申请号 JP20120118439 申请日期 2012.05.24
申请人 TOSHIBA CORP 发明人 ICHIKAWA HISASHI;TAMAOKI NAOKI;TAKASE TOSHIAKI
分类号 H01L21/00;H01L21/306;H01L21/3065 主分类号 H01L21/00
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