| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a substrate, capable of suppressing generation of voids, enhancing its joint strength, and reducing its manufacturing cost. <P>SOLUTION: A method for manufacturing a substrate 10 is a method for manufacturing the substrate 10 made by joining a first substrate 1 and a second substrate 2 and includes the following steps: the first substrate 1 having one surface 1a irradiated with a rare gas plasma and the second substrate 2 having one surface 2a irradiated with an oxygen plasma are prepared; and the one surface 1a of first substrate 1 and the one surface 2a of the second substrate 2 are made to face each other, and the first substrate 1 and the second substrate 2 are pasted together in the atmosphere to be temporarily joined. The first substrate 1 and the second substrate 2, which are in the temporarily joined state, are joined by heating. <P>COPYRIGHT: (C)2012,JPO&INPIT |
