| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a contactor and an inspection device which maintain flatness of a tip of a probe needle with high accuracy and which precisely conduct inspection by suppressing deflection due to a negative pressure. <P>SOLUTION: Contactors include pogo pins which contact with each electrode of two substrates provided facing each other so as to electrically connect the electrodes, and outer tubes which are provided surrounding outer peripheries of the pogo pins so as to support the pogo pins and which contact with each of the two substrates so as to maintain a setting interval between the substrates. The contactors are provided in each pogo pin insertion hole of a connection unit of an inspection device. <P>COPYRIGHT: (C)2012,JPO&INPIT |
