| 摘要 |
An acoustic sensor capable of improving the sensor S/N ratio without impeding reduction in sensor size is provided. A diaphragm (43) which serves as a movable electrode plate is formed on the upper surface of a silicon substrate (42). The diaphragm (43) is rectangular and the four corners of the diaphragm (43) and the central section on the long side thereof are supported by anchors (46). The displacement of the diaphragm (43) is minimized above a line (D) connecting the anchors (46) in the central section on the long side. There are maximum displacement points (G) where displacement is the greatest for each side, on both sides of the line (D) and the line (D) extends in the direction intersecting the direction connecting the maximum displacement points (G). |
