| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an observation device capable of taking an image in a short time in the case of using an image sensor corresponding to delivery of an electric charge only in one direction. <P>SOLUTION: An observation device includes: a stage for holding a specimen; an imaging part capable of imaging the specimen by a time delay integration system; a movement mechanism for relatively moving the specimen and the imaging part; and a rotation mechanism capable of rotating an image by return light from the specimen. <P>COPYRIGHT: (C)2012,JPO&INPIT |
