VAPOR DEPOSITION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an evaporation apparatus that can improve the utilization efficiency of a deposition material by evaporating a small amount of the deposition material.

SOLUTION: A vapor deposition apparatus 10 that vapor-deposition-forms a thin film on a substrate includes: a vessel 3 accommodating a deposition material P comprising an organic material; a conductivity granular mixture 4 mixed with the deposition material P accommodated in the vessel 3; and a heating part 5 induction-heating the granular mixture 4 in the vessel 3, wherein the volume ratio of the granular mixture 4 to the deposition material P is a value in a range of at least 1/10,000 but less than 1/100.

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