发明名称 |
CHARGED PARTICLE MICROSCOPE |
摘要 |
The charged particle beam microscope is configured of: a gas field ionization ion source (1); a focusing lens (5) which accelerates and focuses ions that have been discharged from the ion source; a movable first aperture (6) which limits the ion beam that has passed through the focusing lens; a first deflector (35) which scans or aligns the ion beam that has passed through the first aperture; a second deflector (7) which deflects the ion beam that has passed through the first aperture; a second aperture (36) which limits the ion beam that has passed through the first aperture; an objective lens (8) which focuses, on a sample, the ion beam that has passed through the first aperture; and a means for measuring the signal, which is substantially proportional to the current of the ion beam that has passed through the second aperture.
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申请公布号 |
US2012217391(A1) |
申请公布日期 |
2012.08.30 |
申请号 |
US201013508040 |
申请日期 |
2010.11.01 |
申请人 |
SHICHI HIROYASU;MATSUBARA SHINICHI;ARAI NORIAKI;ISHITANI TOHRU;OSE YOICHI;KAWANAMI YOSHIMI |
发明人 |
SHICHI HIROYASU;MATSUBARA SHINICHI;ARAI NORIAKI;ISHITANI TOHRU;OSE YOICHI;KAWANAMI YOSHIMI |
分类号 |
H01J37/28 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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