| 摘要 |
A recycling device for recycling slurry wastewater from a semiconductor processing process is provided. The recycling device includes a circulation vessel for receiving slurry-containing wastewater; a wastewater feed line connected to the circulation vessel; an ultrafilter device connected via an ultrafilter feed line to the circulation vessel for concentrating mixed wastewater continuously removed from the circulation vessel by means of fluid removal; a wastewater return line for passing the concentrated wastewater into the circulation vessel; and a control device which carries out after one another in time filtration, in which, during a continuous removal of mixed wastewater and concentration thereof by the ultrafilter device, fresh wastewater is continuously fed to the circulation vessel, and concentration, in which, during the continuous removal of mixed wastewater and concentration thereof by the ultrafilter device, the feed of the fresh wastewater to the circulation vessel is reduced or substantially shut off. |
