,申请号JP20040129856-传众专利搜索

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发明名称
摘要
申请公布号	JP5013662(B2)	申请公布日期	2012.08.29
申请号	JP20040129856	申请日期	2004.04.26
申请人		发明人
分类号	C23C16/40;H01L27/108;H01L21/02;H01L21/28;H01L21/314;H01L21/316;H01L21/822;H01L21/8242;H01L27/04;H01L27/08;H01L27/105;H01L29/76;H01L31/062	主分类号	C23C16/40
代理机构		代理人
主权项
地址

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