SURFACE TREATMENT METHOD AND DEVICE,申请号EP20040793321-传众专利搜索

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发明名称	SURFACE TREATMENT METHOD AND DEVICE
摘要
申请公布号	EP1683889(B1)	申请公布日期	2012.08.29
申请号	EP20040793321	申请日期	2004.10.27
申请人	KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.);ASAHI GLASS COMPANY, LIMITED	发明人	HAYASHI, KAZUSHI;KUGIMIYA, TOSHIHIRO;KOBORI, TAKASHI;EBISAWA, JUNICHI;SATO, KAZUO;YOSHIKAWA, YUKIO
分类号	H01L21/67;C23C16/44;C23C16/455;C23F4/00;H01J37/32;H01L21/00;H01L21/3065;H01L21/31;H01L21/316	主分类号	H01L21/67
代理机构		代理人
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