SYSTEM AND METHOD FOR THE DEFECT ANALYSIS OF WORKPIECES

摘要

An apparatus (100, 700) for analyzing an object (201), the analysis apparatus (700) comprising a thermal analysis device (104) adapted for analyzing a thermal distribution of the object in response to a thermal activation of the object, a geometrical measurement device (106) adapted for analyzing the geometry of the object, and an evaluation unit (101) adapted for performing a combined evaluation of information obtained from the thermal analysis device (104) and from the geometrical measurement device (106).