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发明名称
Non-thermal process for forming porous low dielectric constant films
摘要
申请公布号
EP1420439(B1)
申请公布日期
2012.08.29
申请号
EP20030025722
申请日期
2003.11.10
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
LUKAS, AARON SCOTT;BITNER, MARK DANIEL;VRTIS, RAYMOND NICHOLAS;O'NEILL, MARK LEONARD;VINCENT, JEAN LOUISE;KARWACKI, EUGENE JOSEPH, JR.
分类号
H01L21/316;C23C16/40;C23C16/56
主分类号
H01L21/316
代理机构
代理人
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