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发明名称
PLASMA ETCHING APPARATUS
摘要
申请公布号
EP2479781(A4)
申请公布日期
2012.08.29
申请号
EP20100816963
申请日期
2010.07.16
申请人
SPP TECHNOLOGIES CO., LTD.
发明人
YAMAMOTO, TAKASHI;IKEMOTO, NAOYA
分类号
H01L21/3065;H01J37/32;H05H1/46
主分类号
H01L21/3065
代理机构
代理人
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地址
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