PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD THEREOF

摘要

A piezoelectric device capable of ensuring resistance to molding without an increase in costs and a method for producing the same are provided. The piezoelectric device includes an elemental substrate (12) having a piezoelectric element (14) and a conductive pattern (15) electrically connected to the piezoelectric element; and insulating members (20 and 22) disposed on the elemental substrate (12) and surrounding the piezoelectric element (14) leaving a space around the piezoelectric element (14). The insulating members (20 and 22) have an internal conductor connected to the conductive pattern (15) and extending apart from the elemental substrate (12). The internal conductor has expanded portions (17b and 17c) expanding in a direction intersecting the wiring direction of the internal conductor or a detour portion out of the wiring direction. The expanded portions (17b and 17c) or the detour portion crosses the boundary of a sealed space formed around the piezoelectric element.