,申请号JP20060523362-传众专利搜索

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发明名称
摘要
申请公布号	JP5015596(B2)	申请公布日期	2012.08.29
申请号	JP20060523362	申请日期	2004.08.12
申请人		发明人
分类号	H05H1/00;C23C14/52;C23C16/00;C23C16/50;C23C16/52;C23F1/00;G01K11/00;G01N27/60;G01R27/26;G01R27/28;H01J;H01J37/32;H01L21/00;H01L21/302;H01L21/306;H01L21/3065;H01L21/461;H05H1/24	主分类号	H05H1/00
代理机构		代理人
主权项
地址

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