发明名称 ALIGNMENT AND ANTI-DRIFT MECHANISM
摘要 A system includes a displacement sensor, an actuator connected to the displacement sensor, and a feedback unit. The displacement sensor is configured to measure at least one of a relative position and a relative orientation between the displacement sensor and the target object. The feedback unit receives a signal from the displacement sensor related to the measured relative position or relative orientation and controls the actuator to move the displacement sensor on the basis of variations in the received signal arising due to a change in environmental conditions.
申请公布号 EP2491407(A1) 申请公布日期 2012.08.29
申请号 EP20090850676 申请日期 2009.10.23
申请人 ACADEMIA SINICA;LIANG, CHI-MING 发明人 HWANG, ING-SHOUH;HWU, EN-TE;DANZEBRINK, HANS ULRICH;ILLERS, HARTMUT
分类号 G01Q10/06 主分类号 G01Q10/06
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