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发明名称
Molecular beam epitaxy apparatus for producing wafers of semiconductor material
摘要
申请公布号
EP2264225(B1)
申请公布日期
2012.08.29
申请号
EP20090305570
申请日期
2009.06.18
申请人
RIBER
发明人
VILLETTE, JEROME;CHAIX, CATHERINE;CASSAGNE, VALERICK
分类号
C30B23/02;C23C14/56;C30B29/40
主分类号
C30B23/02
代理机构
代理人
主权项
地址
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