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发明名称
MULTILAYER MIRROR
摘要
申请公布号
KR20120096007(A)
申请公布日期
2012.08.29
申请号
KR20127015877
申请日期
2010.10.11
申请人
ASML NETHERLANDS B.V.
发明人
KRIVTSUN VLADIMIR;YAKUNIN ANDREI;MEDVEDEV VIACHESLAV
分类号
G03F7/20;G02B5/08
主分类号
G03F7/20
代理机构
代理人
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地址
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