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发明名称
VACUUM EXHAUST DEVICE AND VACUUM EXHAUST METHOD, AND SUBSTRATE TREATMENT DEVICE
摘要
申请公布号
KR20120096101(A)
申请公布日期
2012.08.29
申请号
KR20127019175
申请日期
2010.11.29
申请人
ULVAC, INC.
发明人
INOUE TOSHIYA;HASHIMOTO KENJI;YAMAMOTO MASAHIRO
分类号
F04B37/16;F04C25/02
主分类号
F04B37/16
代理机构
代理人
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地址
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