CVD REACTOR FOR MANUFACTURING POLYSILICON,申请号KR20090024351-传众专利搜索

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发明名称	CVD REACTOR FOR MANUFACTURING POLYSILICON
摘要
申请公布号	KR101178046(B1)	申请公布日期	2012.08.29
申请号	KR20090024351	申请日期	2009.03.23
申请人		发明人
分类号	C23C16/455;H01L21/205	主分类号	C23C16/455
代理机构		代理人
主权项
地址

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