发明名称 Optical evaluation method by means of laser pulses and corresponding apparatus
摘要 An optical evaluation method and an apparatus for performing said method are described. First laser pulses of a first type and second laser pulses of a second type that differs from the first type are sent onto a sample to be examined. The sample is hit with first incident light from the two laser pulses in at least one manner of simultaneously, within a very short time lag between the two laser pulses, and a time-correlated manner of the two laser pulses, thereby generating a first optical signal, and hit with second incident light from the two laser pulses, thereby generating a second optical signal. The generated first and second optical signals are detected with at least one detector; and an electronic difference between the first and second optical signals is generated.
申请公布号 US8253937(B2) 申请公布日期 2012.08.28
申请号 US20090626057 申请日期 2009.11.25
申请人 KRISHNAMACHARI VISHNU VARDHAN;HAY WILLIAM C.;SEYFRIED VOLKER;WIDZGOWSKI BERND;LEICA MICROSYSTEMS CMS GMBH 发明人 KRISHNAMACHARI VISHNU VARDHAN;HAY WILLIAM C.;SEYFRIED VOLKER;WIDZGOWSKI BERND
分类号 G01J3/44 主分类号 G01J3/44
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