| 摘要 |
PURPOSE: A thermal treatment apparatus and a temperature measuring method thereof are provided to reduce installation costs by not correcting a signal from a thermocouple. CONSTITUTION: A temperature sensor(50) of a furnace in a reference region(A1) has a first thermocouple composed of an R thermocouple and an S thermocouple and a second thermocouple composed of the other thermocouples. A temperature sensor of a furnace in other regions(A2-A10) has the second thermocouple. The second thermocouple of the reference region and the second thermocouple of the other region are connected to an electromotive force circuit. A temperature difference between the reference region and the other region is obtained by the electromotive force circuit. A temperature of the reference region is obtained by the first thermocouple. A temperature of each region is obtained by the temperature difference of the electromotive force circuit and the temperature of the reference region.
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