摘要 |
An ionization apparatus comprises a first electrode provided on the outer periphery of a dielectric cylindrical body and a second cylindrical electrode placed inside at a center of the cylindrical body. When an AC high voltage is impressed across the first electrode and the second cylindrical electrode, a barrier discharge occurs within the cylindrical body. A distal end portion of the second cylindrical electrode projects outwardly from the distal end of the cylindrical body, a thermal equilibrium plasma P having a low electron temperature is generated outwardly from the distal end of the cylindrical body without a plasma jet ascribable to the barrier discharge emerging outwardly from the distal end of the cylindrical body. By exposing a sample S to the thermal equilibrium plasma P, particles (atoms, molecules) desorbed from the sample S undergo soft ionization without being decomposed or polymerized. |