发明名称 Polishing slurry for aluminum and aluminum alloys
摘要 The invention is directed to a method of polishing a surface of an object that includes aluminum. The method includes the step of contacting the surface of the object with a soft polishing pad and a polishing composition. The polishing composition includes abrasive particles, an agent that oxidizes aluminum, and a liquid carrier to polish the surface of the object. The polishing composition includes the abrasive particles suspended in the liquid carrier, and is applied at a pH above about 7.
申请公布号 US8251777(B2) 申请公布日期 2012.08.28
申请号 US20080069495 申请日期 2008.02.11
申请人 MOEGGENBORG KEVIN;CLARK JOHN;GILLILAND JEFFREY;LESIAK STANLEY;WILSON SUSAN;BRUSIC VLASTA;CABOT MICROELECTRONICS CORPORATION 发明人 MOEGGENBORG KEVIN;CLARK JOHN;GILLILAND JEFFREY;LESIAK STANLEY;WILSON SUSAN;BRUSIC VLASTA
分类号 B24B13/00 主分类号 B24B13/00
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