发明名称 |
Polishing slurry for aluminum and aluminum alloys |
摘要 |
The invention is directed to a method of polishing a surface of an object that includes aluminum. The method includes the step of contacting the surface of the object with a soft polishing pad and a polishing composition. The polishing composition includes abrasive particles, an agent that oxidizes aluminum, and a liquid carrier to polish the surface of the object. The polishing composition includes the abrasive particles suspended in the liquid carrier, and is applied at a pH above about 7. |
申请公布号 |
US8251777(B2) |
申请公布日期 |
2012.08.28 |
申请号 |
US20080069495 |
申请日期 |
2008.02.11 |
申请人 |
MOEGGENBORG KEVIN;CLARK JOHN;GILLILAND JEFFREY;LESIAK STANLEY;WILSON SUSAN;BRUSIC VLASTA;CABOT MICROELECTRONICS CORPORATION |
发明人 |
MOEGGENBORG KEVIN;CLARK JOHN;GILLILAND JEFFREY;LESIAK STANLEY;WILSON SUSAN;BRUSIC VLASTA |
分类号 |
B24B13/00 |
主分类号 |
B24B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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