| 摘要 |
PURPOSE: An optical device, a scanning method, a lithography device, and a device manufacturing method are provided to remove position setting errors between an alignment sensor and an overlay measuring device by using the alignment sensor to measure target asymmetry. CONSTITUTION: An optical device includes an object lens(524) and a movable optical element. The object lens transmits radiation between an object and an optical system of the optical device. The optical element includes a mirror(562) arranged between the optical system and the object lens. A mirror is inclined to change the direction of the radiation by the object lens. The mirror is inclined around an axis along an intersection between a pupil plane of the object lens and the plane of the mirror. |
