COATING DEVICE

摘要

PURPOSE: A coating device is provided to prevent a temperature of a common chamber from rising by discharging a baked substrate from the coating substrate without inputting the baked substrate to the common chamber. CONSTITUTION: A coating unit coats a substrate with liquid containing easily oxidized metal. A pre-processor(PRE) pre-processes the substrate before the substrate is coated with the liquid. A connection unit(CNE) includes a coating space for liquid coating and a connection space for connecting a pre-process space and controlling the atmosphere of the connection space to the atmosphere of inactive gas.