发明名称 Fabrication methods for radiation hardened isolation structures
摘要 Semiconductor devices can be fabricated using conventional designs and process but including specialized structures to reduce or eliminate detrimental effects caused by various forms of radiation. Such semiconductor devices can include one or more parasitic isolation devices and/or buried layer structures disclosed in the present application. The introduction of design and/or process steps to accommodate these novel structures is compatible with conventional CMOS fabrication processes, and can therefore be accomplished at relatively low cost and with relative simplicity.
申请公布号 US8252642(B2) 申请公布日期 2012.08.28
申请号 US20090627784 申请日期 2009.11.30
申请人 MORRIS WESLEY H.;SILICON SPACE TECHNOLOGY CORP. 发明人 MORRIS WESLEY H.
分类号 H01L21/8238 主分类号 H01L21/8238
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