发明名称 |
Excimer lamp |
摘要 |
An excimer lamp has a single tubular discharge chamber configured to enclose a discharge gas that is a noble gas or a mixing gas consisting of a noble gas and a halogen gas; a pair of electrodes configured to be arranged along opposite sides of the exterior surface of the discharge chamber; and an outer tube configured to cover the discharge chamber and the electrodes. Excimer molecules are produced by either dielectric barrier discharge or capacitive-coupled high-frequency discharge. An interior of a space formed between the outer tube and the discharge chamber is either in a vacuum state that is necessary and sufficient for preventing discharge, or is filled with an arc-suppression gas. |
申请公布号 |
US8253332(B2) |
申请公布日期 |
2012.08.28 |
申请号 |
US20100879103 |
申请日期 |
2010.09.10 |
申请人 |
YASUDA MAKOTO;KOBAYASHI GO;ORC MANUFACTURING CO., LTD. |
发明人 |
YASUDA MAKOTO;KOBAYASHI GO |
分类号 |
H01J17/20;H01J61/12;H01J61/26;H01J61/34;H01J65/00 |
主分类号 |
H01J17/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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