发明名称 |
Apparatus for producing trichlorosilane and method for producing trichlorosilane |
摘要 |
An apparatus for producing trichlorosilane in which metallurgical grade silicon powder supplied to a reactor is reacted with hydrogen chloride gas while being fluidized by the hydrogen chloride gas, thereby discharging trichlorosilane generated by the reaction from the reactor, includes: a plurality of gas flow controlling members which are installed along a vertical direction in an annular shape R from an inner peripheral wall of the reactor in an internal space of the reactor; and a heat transfer tube which is installed along the vertical direction in the annular space R and through which a heating medium passes. |
申请公布号 |
US8252241(B2) |
申请公布日期 |
2012.08.28 |
申请号 |
US20100656126 |
申请日期 |
2010.01.19 |
申请人 |
NARUKAWA MITSUTOSHI;MITSUBISHI MATERIALS CORPORATION |
发明人 |
NARUKAWA MITSUTOSHI |
分类号 |
B01J8/24;B01J8/34;B01J8/38;C01B33/107 |
主分类号 |
B01J8/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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