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发明名称
ELECTRON MICROSCOPE AND METHOD OF ESTIMATING DEFOCUS THEREFOR.
摘要
申请公布号
NL2006300(C)
申请公布日期
2012.08.28
申请号
NL20112006300
申请日期
2011.02.25
申请人
TECHNISCHE UNIVERSITEIT DELFT, NULL
发明人
TEJADA RUIZ, ARTURO;DEKKER, ARNOLD JAN
分类号
H01J37/26;H01J37/28
主分类号
H01J37/26
代理机构
代理人
主权项
地址
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