Plasma diagnose device with auxiliary double probes,申请号KR20100110796-传众专利搜索

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发明名称	Plasma diagnose device with auxiliary double probes
摘要
申请公布号	KR101177377(B1)	申请公布日期	2012.08.27
申请号	KR20100110796	申请日期	2010.11.09
申请人		发明人
分类号	H01L21/66;G01R1/073;H01L21/3065	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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