发明名称 |
SYNTHESIS OF NANOPARTICLES ON FOREST OF CARBON NANOTUBES |
摘要 |
PURPOSE: A manufacturing method of nano-particles on carbon nano-tube forest is provided to have uniform diameter on the carbon nano-tube forest by using an atomic layer deposition. CONSTITUTION: A manufacturing method of nano-particles on carbon nano-tube forest comprises the following steps: growing the carbon nano-tube forest on wafer; and performing the atomic layer deposition of the metal oxide in the carbon nanotube forest by using reactive gas and precursor. The carbon nano-tube forest has deformity or impurities on the surface. The carbon nano-tube forest is a single-walled carbon nano-tube(SWCNT) forest. The manufactured nano-particles have a botryoidally shape. The first step comprises the following steps: evaporating aluminum(Al) thin film from the silicon wafer; evaporating an iron(Fe) super-thin film from the aluminum(Al) thin film; and growing the carbon nano-tube in a chemical vapor deposition(CVD) method which use water on the iron (Fe) super-thin film. |
申请公布号 |
KR20120094713(A) |
申请公布日期 |
2012.08.27 |
申请号 |
KR20110014147 |
申请日期 |
2011.02.17 |
申请人 |
KONKUK UNIVERSITY INDUSTRIAL COOPERATION CORP. |
发明人 |
MIN, YO SEP |
分类号 |
B82B3/00;B82Y30/00 |
主分类号 |
B82B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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